VAT has developed the stepper motor driven “All-metal variable leak valve” with integrated pressure controller. The controlled Series 590 variable leak valve combines two distinguished characteristics of VAT product lines: the excellent quality of VAT all-metal valves, well known and proven in the research and surface analytical industries, and the leading edge technology of control valves, known from butterfly and gate valve control systems in semiconductor and thin film production.
The S590 has been utilized in a wide range of applications. The valve enables simple and user friendly system pressure regulation for the whole vacuum range from rough vacuum to XHV.
