Mass flow controller

with fast settling time

  • Mass flow controller
    Mass flow controller

The Swiss sensor manufacturer Sensirion's SFC5000 Series digital mass flow controller is suitable for diverse applications in the industrial and medical technology sectors. The SFC5000 Series offers long-term stability and enables precise control over a wide control range of 1000:1. Its settling time is just 50 milliseconds. Its performance is based on Sensirion’s CMOSens Technology, which combines the high-precision sensor element and the analog and digital signal processing circuitry on a single tiny CMOS silicon chip. The sensor signal is converted into a fully calibrated and temperature compensated digital signal directly on the chip. The mass flow controller features both analog and digital interfaces, enabling new features such as optional multigas, gas recognition and self-test capability.

The SFC5000 Series mass flow controller operates from a standard supply voltage of 14–24VDC. It can be used with input pressures up to 10 bar, and it is resistant to electromagnetic interference (EMI). Due to exceptionally fast reaction time of the flow chip combined with fast control algorithm and valve, inlet pressure fluctuations can be regulated in real time providing stable output flow profile. The mass flow controller features a vacuum-tight stainless steel package of the flow chip which is mounted on a sturdy aluminum or stainless steel flow body.

The mass flow controller is available with various connection options (down-mount, C-/W-seal, Swagelok, VCR and VCO). All this makes the new mass flow controller ideal for controlling and monitoring mass flow in many different applications such as plasma etching and deposition, process automation, analytical instrumentation, medical anesthesia/ventilation equipment and other areas. The controller is available for large volume OEM projects. The digital MFC platform facilitates fast prototyping of OEM samples and offers significant advantages in after sale support. Furthermore, a new evaluation kit is released to support developers in quick and economical evaluation and qualification of the new mass flow controllers.