Compact Mass Flow Controller

Lightweight and versatile device with high accuracy

  • Compact Mass Flow Controller
    Compact Mass Flow Controller

The SFC6000 is Sensirion’s next-generation mass flow controller, impressing with an unbeatable price–performance ratio and a very attractive delivery time of eight weeks. 

The SFC6000 is very compact and lightweight; it therefore allows the customer to optimize their devices in terms of size and weight. This is a decisive advantage, especially for portable devices. Furthermore, it offers great performance in terms of repeatability, accuracy, control range and speed. The SFC6000 is highly integrated and has a very robust supply chain due to how few electronic components are used. It is best suited for analytical instruments (gas chromatography or bioreactors), semiconductor applications (front-opening unified pods or glass coatings and treatment) and process automation.

Different versions available

Based on the principle of thermal mass measurement and using the proven CMOSens® MEMS technology, Sensirion builds revolutionary mass flow controllers with best-in-class performance and speed which – unlike most other devices on the market – do not drift and do not require in-service re-calibration.

If you are looking for a mass flow meter, the SFM6000 is a valve-less sister variant of the SFC6000 that offers the same performance at an even lower price.